Hermetic sealing of crystal device and MEMS
Joining method: Seam welding
Features of seam welding
- In seam welding, because the welded area per each welding is very small, low pressure and small welding current will be sufficient, which is suitable for ceramic package.
- In seam welding, welding is made only to the plated layer. Therefore, the base material (kovar) will not be exposed to ambient air, resulting in stable operation over a long period of time.
- Vacuum sealing, where seam welding is conducted in vacuum, is also possible.
- Full automatic seam welder

- Illustration of seam welding

Micro-joining application: Seam welding of crystal device and MEMS.
A lid (metal) is placed on a ceramic package, and hermetic sealing is achieved by seam welding.
Related video
Playback time: Approx. 2'48"
- Please be careful for the volume adjustment as this movie contains sound.
Applicable machine models
Sample test
We will be pleased to test your sample with our proposed joining method, and return it with a report.
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